Product Name: Tungsten Disilicide (WSi2)
Specification: 0.8-10um (D50)
Appearance: Irregular
Color: Black Grey
Features: high melting point, high hardness, good conductivity, thermal stability, and oxidation resistance
Application: Microelectronics, electronic devices, energy storage, catalysts and other fields
Tungsten silicide
CAS number: 12039-95-1
EINECS Number: 12039-95-1
Melting point: 2320 ° C
Density: 14.400
Density: 9.88 g/cm3
Property: Has good antioxidant properties, soluble in aqua regia, but insoluble in water. The chemical properties of tungsten disilicide are that it can undergo violent reactions with many substances, such as strong acids, fluorine, oxidants, and halogenated compounds.
Usage: WSi2 is commonly used as an electric shock material in microelectronics, with a resistance of 60-80 μ Ω cm. At the same time, it is often used as a shunt on polycrystalline silicon lines to increase the conductivity and signal speed of the polycrystalline silicon lines. Tungsten disilicide (WSi2) has become increasingly common in CMOS processes due to its high melting point, good stability, and low resistivity. It is mainly used to enhance the ohmic contact between metal aluminum and silicon, and is used together with polysilicon as a gate conductor material to reduce the gate's resistivity.
Preparation method of tungsten silicide:
(1) Mix tungsten powder and silicon powder in a ratio of 1:2, and titanium powder and graphite powder in a ratio of 1:1, and then mix them evenly.
(2) Place the W-Si mixed powder in the center of the crucible, evenly place the Ti-C mixed powder between the W-Si mixed powder and the crucible, and finally place a layer of Ti-C mixed powder on top of all mixed powders. The weight ratio of Ti-C mixed powder to W-Si mixed powder in the crucible is (0.8~1.2): 1
(3) Place the crucible containing the mixed powder into a sealed reactor, evacuate and fill it with argon gas, and then use a tungsten wire to initiate a reaction between the mixed materials.
(4) After cooling, remove the reacted material, separate titanium carbide from tungsten disilicide, and crush them separately to obtain titanium carbide and tungsten disilicide powders.
Packaging and storage: Generally, it is an inert gas anti-static packaging, which should be sealed and stored in a dry and cool environment. It should not be exposed to air for a long time to prevent moisture and aggregation, which will affect the dispersion performance and use effect.
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